R-DEC Co., Ltd.

RHEED
30kV Electron Gun & Power Supply with Remote Controller

PICO-RHEED
RHEED for Organic Thin Films

SPR
Surface Plasmon Resonance Spectrometer

K-Cell, Valved Cracker Cell,
RF Plasma Cell,DC Power Supply,
Heated Viewport,
Automated Valve Positioner

kSA Emissometer
Ex-Situ MOCVD Wafer Carrier Inspection System

kSA ICE
All-In-One In-situ Metrology Tool for GaN MOCVD

kSA400
Complete Analysis of RHEED Pattern Images/Movies

kSA BandiT
In-situ Monitoring of Wafer/Thin
Film Surface Temperature

kSA MOS
In-situ Monitoring of
Thin Film Curvature/Stress

kSA MOS Ultra Scan
2D/3D Mapping of
Thin Film Curvature/Stress

kSA RateRat Pro
In-situ Monitoring of
Deposition Rate/Film Thickness/
Reflectivity/n, k

UHV Evaporator
Single-cell or Triple-Cell
Flux Monitor incorporated

Vacstage
UHV Manipulators

i-GONIO
UHV-compatible LHe Gonio Head

TDS
Thermal Desorption Spectroscopy System for Hydrogen Analysis of
a Metal Piece

High Vacuum
Thin Film Deposition System for Josephson Junction Superconductor Applications
MEB 550 S System

High Purity
Deposition Materials
For all types of thin film applications

e-Gun
Single/Multiple Crucible,
Linear/Rotary/Hydra,
3kW to 15kW

Valve

Vacuum gauge,
Q-MS, MFC

Non Evaporable
Getter (NEG) pump

VD85 -
Digital Compact Vacuum Meters/Data Loggers

VTI Calibration
Leak Standards

The 83rd JSAP Autumn Meeting 2022 September 20 (Tue.) –　23 (Fri.), 2022 Kawauchi-kita Campus, Tohoku University & Online
The 69th JSAP Spring Meeting 2022 March 22 - 26, 2022 Sagamihara Campus, Aoyama Gakuin University Online
IVC-22 THE 22ND INTERNATIONAL VACUUM CONGRESS September 11 (Sun.) -　16 (Fri.), 2022 Sapporo Convention Center, Sapporo, Japan
ISCSI-IX 9th International Symposium on Control of Semiconductor Interfaces September 5 (Mon.) -　8 (Thu.), 2022 Nagoya University, Nagoya, Japan
The 19th Particle Accelerator Society of Japan August 8 (Mon.) - 11 (Thu), 2022 Kitakyushu Convention and Visitors Association