株式会社アールデック

RHEED
30kV Electron Gun & Power Supply with Remote Controller
RHEED
30kV Electron Gun & Power Supply with Remote Controller

PICO-RHEED 
RHEED for Organic Thin Films

SPR
Surface Plasmon Resonance Spectrometer

K-Cell, Valved Cracker Cell,
RF Plasma Cell,DC Power Supply,
Heated Viewport,

Automated Valve Positioner

kSA Emissometer 
Ex-Situ MOCVD Wafer Carrier Inspection System
kSA ICE 
All-In-One In-situ Metrology Tool for GaN MOCVD

kSA400
Complete Analysis of RHEED Pattern Images/Movies

kSA BandiT
In-situ Monitoring of Wafer/Thin
Film Surface Temperature

kSA MOS
In-situ Monitoring of
Thin Film Curvature/Stress

kSA MOS Ultra Scan
2D/3D Mapping of
Thin Film Curvature/Stress

kSA RateRat Pro
In-situ Monitoring of
Deposition Rate/Film Thickness/
Reflectivity/n, k
 
UHV Evaporator
Single-cell or Triple-Cell
Flux Monitor incorporated
Vacstage
UHV Manipulators

i-GONIO
UHV-compatible LHe Gonio Head

TDS
Thermal Desorption Spectroscopy System for Hydrogen Analysis of
a Metal Piece
High Vacuum 
Thin Film Deposition System for Josephson Junction Superconductor Applications

MEB 550 S System

High Purity
Deposition Materials

For all types of thin film applications

e-Gun
Single/Multiple Crucible,
Linear/Rotary/Hydra,
3kW to 15kW

Valve

Vacuum gauge,
Q-MS, MFC


Non Evaporable
Getter (NEG) pump


VD85 -
Digital Compact Vacuum Meters/Data Loggers


VTI Calibration
Leak Standards



The 83rd JSAP Autumn Meeting 2022
    September 20 (Tue.) – 23 (Fri.), 2022
    Kawauchi-kita Campus, Tohoku University & Online
The 69th JSAP Spring Meeting 2022
    March 22 - 26, 2022
    Sagamihara Campus, Aoyama Gakuin University
     Online
IVC-22
    THE 22ND INTERNATIONAL VACUUM CONGRESS
    September 11 (Sun.) - 16 (Fri.), 2022
    Sapporo Convention Center, Sapporo, Japan
ISCSI-IX
    9th International Symposium on Control of Semiconductor Interfaces
    September 5 (Mon.) - 8 (Thu.), 2022
    Nagoya University, Nagoya, Japan
The 19th Particle Accelerator Society of Japan
    August 8 (Mon.) - 11 (Thu), 2022
    Kitakyushu Convention and Visitors Association
Copyright(c)1988-2020 R-DEC Co.,Ltd. All Rights Reserved.