R-DEC Co., Ltd.

RHEED
30kV Electron Gun & Power Supply with Remote Controller

PICO-RHEED
RHEED for Organic Thin Films

SPR
Surface Plasmon Resonance Spectrometer

UHV Evaporator
Single-cell or Triple-Cell
Flux Monitor incorporated

Vacstage
UHV Manipulators

i-GONIO
UHV-compatible LHe Gonio Head

TDS
Thermal Desorption Spectroscopy System for Hydrogen Analysis of
a Metal Piece

K-Cell, Valved Cracker Cell,
RF Plasma Cell,DC Power Supply,
Heated Viewport,
Automated Valve Positioner

kSA Emissometer
Ex-Situ MOCVD Wafer Carrier Inspection System

kSA ICE
All-In-One In-situ Metrology Tool for GaN MOCVD

kSA400
Complete Analysis of RHEED Pattern Images/Movies

kSA BandiT
In-situ Monitoring of Wafer/Thin
Film Surface Temperature

kSA MOS
In-situ Monitoring of
Thin Film Curvature/Stress

kSA MOS Ultra Scan
2D/3D Mapping of
Thin Film Curvature/Stress

kSA RateRat Pro
In-situ Monitoring of
Deposition Rate/Film Thickness/
Reflectivity/n, k

High Vacuum
Thin Film Deposition System for Josephson Junction Superconductor Applications
MEB 550 S System

High Purity
Deposition Materials
For all types of thin film applications

e-Gun
Single/Multiple Crucible,
Linear/Rotary/Hydra,
3kW to 15kW

Valve

Vacuum gauge,
Q-MS, MFC

Non Evaporable
Getter (NEG) pump

VD85 -
Digital Compact Vacuum Meters/Data Loggers

ICAS 2022 The 7th International Conference on Advanced Steels May 29 - June 1, 2022 Tsukuba, Japan
The 69th JSAP Spring Meeting 2022 March 22 to 26, 2022 Sagamihara Campus, Aoyama Gakuin University Online
The 69th JSAP Spring Meeting 2022 March 22 - 26, 2022 Sagamihara Campus, Aoyama Gakuin University Online